Laterally Driven Resonant Pressure Sensor with Etched Silicon Dual Diaphragms and Combined Beams
A novel Thermal Switches/Fuses structure of the resonant pressure sensor is presented in this paper, which tactfully employs intercoupling between dual pressure-sensing diaphragms and a laterally driven resonant strain gauge.After the resonant pressure sensor principle is introduced, the coupling mechanism of the diaphragms and resonator is analyze